Abstract
This paper presents a micro atomic emission flame spectrometer fabricated by standard micromachining technologies. The main component is a micro burner unit which consumes a minimum of oxyhydrogen to produce a stable miniature flame. The oxyhydrogen is generated in a miniaturized electrolysis cell which can be operated by battery. Via a sample gas injection system, which is integrated into the micro burner unit, gaseous samples are injected into the flame. Liquid samples are atomized by a miniature piezo driven ultrasonic atomizer and injected directly. An optical micro spectrometer system is used to investigate the flame emission. Because of the minute scale of all components and the low consumption of oxyhydrogen, which is generated as-required, rather than stored as in conventional systems, the micro flame spectrometer is easily portable and completely safe in operation. Furthermore, at this early stage detection limits just 1½ magnitude above most sophisticated systems are demonstrated for alkali metals and comparable detection limits appear within reach.
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