Abstract
We report the design and fabrication of a micro-electro-mechanical-systems (MEMS)-based microactuator, that floats on the surface of water and is driven by steam. We named the actuator “micro-Ro-boat”, a compound word created from the words “robot” and “boat”. The MEMS-based micro-Ro-boat utilizes steam as the propulsion power, giving it a high speed and long lifetime. A hydrophobic surface has been utilized for the wing of the actuator to enhance the buoyancy. Instead of using gas or fuel, the proposed micro-Ro-boat utilizes steam form electrically heated water. The velocity of the micro-Ro-boat is in the range of 0.5–2 cm/s and the maximum loading capability for a device size of 10 ×10 mm2 is 0.4 g.
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