Micro-Electro-Mechanical Switch Based on Suspended Horizontal Dense Mat of CNTs by FIB Nanomanipulation

Abstract

The paper presents the carbon nanotubes (CNTs) alignment and length dependence with respect to the catalyst pattern design, the fabrication of a CNT MEM switch, nanomanipulating a CNT array by FIB and the electrical characterization of the device to evaluate the electrical and mechanical properties of the CNT membrane. The catalyst design permits to obtain, during the same growth process, both vertical and horizontal aligned nanotubes. The high density guaranties to the CNT mat to act as a compact and flexible material that could be manipulated to make MEM devices. DC electrical measurements of the CNT MEM switch show an equivalent resistivity of 0.08Ωcm and a Young Modulus of 160MPa that permit to have low actuation voltage devices in the downscaling process.