Abstract
Abstract Micro-cantilever has been progressively used for the development of miniaturized sensors for gas sensing, biochemical analysis, medical applications and quality and process control. Micro-cantilevers are fabricated with rectangular silicon slabs having thickness below 1 µm. For gas sensing applications, Si cantilever surface is modified with appropriate sensing materials for selective adsorption of gas/vapor or biomolecules. The bending of the cantilever due to different surface conditions is measured with laser beam deflection to get the sensitivity of the sensor. The current article discusses the background, principle of operation and bending characteristics of micro-cantilever gas sensors. Various applications and applicability of the micro/nano cantilever gas sensors have also been covered in the present report. Finally, the article has been concluded with future prospects of microcantilever gas sensors for multiple potential applications. Keywords: Microcantilever, gas sensing, fast response, selectivity, biosensor Cite this Article Deepika Saxena, Arnab Hazra and Sukumar Basu . Micro-cantilever Sensors for Efficient Gas Sensing. Journal of Semiconductor Devices and Circuits . 2019; 6(3): 16–24p.
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