Abstract
The reliability analysis of MEMS gyroscope under long-term operating condition has become an urgent requirement with the enlargement of its application scope and the requirement of good durability. In this study we propose a lifetime prediction method for MEMS gyroscope based on accelerated degradation tests (ADTs) and acceleration factor model. Firstly, the degradation characteristic (bias instability) is extracted based on Allan variance. The effect of temperature stress on the degradation rate of bias instability is analyzed, and it shows that the degradation rate of bias instability would increase with the increase of the temperature. Secondly, the ADTs of MEMS gyroscope are designed and conducted, the degradation model of MEMS gyroscope is established based on the output voltage of MEMS gyroscope and Allan variance. Finally, the acceleration factor model of MEMS gyroscope under temperature stress is derived, and the lifetime of the MEMS gyroscope is predicted based on two group tests data under high stress level. The results show that the lifetime calculated by the acceleration factor model and mean lifetime under high stress levels is close to the mean lifetime calculated by the linear equation at normal temperature stress.
Highlights
MEMS gyroscopes, due to its lower mass, lower power consumption, and smaller volume, have become one of the most promising inertial components, widely used in commercial, military and other fields [13], such as inertial navigation devices, portable electronic products and so on
In order to characterize the degradation trend of MEMS gyroscope, we propose the following steps: Step 1, Convert the output voltage of the MEMS gyroscope to angular rate in each day, and calculate the root mean square value of the angular rate in each day based on equation (2)
This paper establishes the degradation model and acceleration factor model of MEMS gyroscope based on Allan variance and Accelerated degradation test (ADT), and proposes a universal lifetime prediction method for MEMS gyroscope
Summary
MEMS gyroscopes, due to its lower mass, lower power consumption, and smaller volume, have become one of the most promising inertial components, widely used in commercial, military and other fields [13], such as inertial navigation devices, portable electronic products and so on. Temperature stress may be the most likely accelerated fabricated on Pyrex glass base under the proof mass, as shown in Figstress of MEMS gyroscope in ADTs. Extraction of degradation characteristic is the key step to establish to form driving capacitance and detecting capacitance. The excitation mode is the flexural vibration methods (autocorrelation function, Gauss Markov process and autore- of the slanted beam; the detection mode is the torsional vibration of gressive model) and the Kalman filter method. There will be an oscillation in detection axis (Z direction) due to the Coriolis Effect if there is an angular rate in the sensitive axis (Y direction), which reflects the value of the input angular rate
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