Abstract
Two types of the silica membrane were prepared by the CVD with the aid of evacuation. Porous glass tubes with outer diameter of 5 mm, inner diameter of 4 mm were used as supports. Mean pore diameters of the supports were 4 nm (CVD-1) and 2 nm (CVD-2), respectively. Tetraethoxysilane (TEOS, Si(OC 2 H 5 ) 4 ) and oxygen were used as reactants. The inside of the membrane modules were evacuated with a vacuum pump to deposit silica near the pores preferentially. Due to evaluate methanol vapor separation, mixed gas separation of the membranes were measured using H 2 -10%CH 3 OH and CO-10%CH 3 OH gas mixtures at 373 and 473 K. At 473 K, the separation factors of H 2 /CH 3 OH were about 6 for CVD-1 and about 20 for CVD-2. These value were higher than that of the porous glass membrane with mean pore diameter of 4 nm (H 2 /CH 3 OH=1.2). The separation factor for CVD-2 was about 5 times as large as the theoretical Knudsen value (H 2 /CH 3 OH=4).
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