Abstract
<span style="font-size: 9pt; font-family: 'Times New Roman', serif;">This work presents new fabrication technique for micro power-</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">inductors </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">by using metal-embedded SU-8 slab techniques. This techniques used X-ray lithography to fabricate high aspect</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">-r</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">atio LIGA-like micro-structures in form of embedded structure in SU-8 slab </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">and applied for inductor’s</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> winding </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">fabrication </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">with aspect-ratio of 10. This</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">high-aspect ratio</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">structure</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> can provide very low resistance winding but preserve small form factor and low profile. Inductors </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">were</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> designed as pot-core structures with</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">8 μm-thick permalloy core and 250 μm-thick coppe</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">r</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> winding. 4-type</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">s</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> of inductors were fabricated including 3, 5, 10 and 16 turns in the area of 1.8 mm<sup>2</sup> to 9.5 mm<sup>2</sup>. All inductors have overall heights of 370 μm, measured inductance value in a range of 70 nH to 1.3 μH at 1 MHz and </span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;">DC</span><span style="font-size: 9pt; font-family: 'Times New Roman', serif;"> resistance value of 30 mΩ to 336 mΩ for 3 turns to 16 turns respectively. From this result, high aspect-ratio inductors show</span><span style="font-size: 10.0pt; font-family: 'Times New Roman','serif'; mso-fareast-font-family: Calibri; mso-bidi-font-family: 'Cordia New'; mso-bidi-theme-font: minor-bidi; mso-ansi-language: EN-US; mso-fareast-language: EN-US; mso-bidi-language: TH;"> good results including low-resistance, high inductance, and a small form factor as expected. </span>
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