Abstract
A flow-induced-vibration Micro-electronic-mechanic System(MEMS)energy harvesting unit based on an Aluminum nitride(AlN)film on the silicon was presented.The AlN film with crystal orientation(002)was prepared by DC-pulse magnetron sputtering and its performance was characterized by the X-ray Diffraction(XRD)and the Scanning Electron Microscopy(SEM).The results show that the crystal orientation and performance of the AlN film are depended on the seed layer materials,gas flow ratio and the substrate temperature,its crystal orientation is(002),and its intensity and Full Width at Half Maximum(FWHM)are 105counts and 2.7°,respectively.The prototype of the flowinduced-vibration MEMS energy harvesting unit was presented after optimizing process flow.The wind tunnel experiments show that the maximum power output of the flow-induced-vibration MEMS energy harvesting unit is about 1.6μW when the wind speed is 15.9m/s.The optimization process also can be used to fabricate other MEMS devices based on the AlN film.
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