Abstract
The purpose of this research is to develop the multi-functional thermal analysis system, where fast thermal analysis and resonance mass analysis are conducted with SEM observation using a tiny cantilever type calorimeter. The developed calorimeter can conduct a fast DTA of temperature scan rate over 10000K/s and mass measurement of nano-gram sample by detecting mechanical resonance of the cantilever. In this paper effects of air on the thermal and mass analysis with the calorimeter were experimentally investigated. Moreover, simultaneous thermal and mass analysis test with tiny copper sulfate pentahydrate showed sub-microgram dehydration process in a continuous fast temperature scan operation.
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