Abstract
In this paper, we report on a novel MEMS electrostatic inductive transformer using potassium ion electrets on mechanically movable silicon microelectrodes. The device consists of a pair of electrostatic comb drive actuators that share a common mass in the middle part of a spring–mass–spring system. When an excitation AC voltage is applied to the electrode of the input-port comb drive at its mechanical resonant frequency, the mass in the middle oscillates to generate electrostatic inductive charges on the electrodes of the output-port comb drive, which could be read out as an output current. By appropriately designing the ratio of force factors of input- and output-port comb drives, the device operates as a transformer to amplify the current at a high efficiency over of 90% under the optimal load condition.
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