Abstract
With the help of micro-electro-mechanical system (MEMS) techniques, acoustic resonators and filters can be further miniaturized in the last decade and dominate the front end of wireless communication system. This Chapter covers the emerging technologies in the last decade, including (scandium-doped) aluminum nitride bulk acoustic wave (BAW), lithium niobate thin-film surface acoustic wave, and lithium niobate Lamb acoustic wave resonators and filters.
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