Abstract
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.
Highlights
Acoustic emission (AE) is based on the detection of propagating elastic waves released by sudden stress-strain change in materials
Since the development of high-resolution instrumentation and data analysis tools, the AE method has been applied as a nondestructive evaluation tool in a variety of applications [1]
Figure shows an resonant frequency of MEMS AE sensors can be measured through impedance measurement.example
Summary
Acoustic emission (AE) is based on the detection of propagating elastic waves released by sudden stress-strain change in materials. Since the development of high-resolution instrumentation and data analysis tools, the AE method has been applied as a nondestructive evaluation tool in a variety of applications [1]. The energy released by an AE source propagates through the medium and reaches the AE sensor, mechanical signal into electrical signal, defined as AE signal. AE sensors are made of bulky piezoelectric ceramics. While they have been used successfully in many applications, manual manufacturing, cost size AE require moving the technology towards frequencies are discussed. Mass manufacturing of AE sensors increased reliability, reduced cost and size.
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