Abstract

Multicomponent coatings based on different metallic and non-metallic elements possess the combined benefit of individual components leading to further improvement of coating properties. In this study, monolayered Ti–Al–N, multilayered Ti–Al–N/TiN, gradient Ti–Al–Si–N, and multilayered Ti–Al–Si–N/TiN coatings were synthesized by using a cathodic-arc evaporation (CAE) system. In addition to Ti, Ti 33Al 67 and Al 88Si 12 cathodes were used for the deposition of Ti–Al–N, and Ti–Al–Si–N coatings, respectively. The gradient Ti 0.50Al 0.43Si 0.07N, and multilayered Ti 0.50Al 0.43Si 0.07N/TiN with nanograins separated by disordered grain boundaries possessed lower residual stress (− 2.8 ~ − 4.8 GPa) than that of monolayered Ti–Al–N (− 6.8 GPa) and multilayered Ti–Al–N/TiN coatings (− 5.7 GPa). The highest hardness was obtained for the gradient Ti 0.50Al 0.43Si 0.07N (38 ± 2 GPa) with Ti/(Ti + Al + Si) content ratio being 0.5. On the contrary, the multilayered Ti 0.50Al 0.43Si 0.07N/TiN possessed the highest H 3/ E ⁎2 ratio of 0.182 ± 0.003 GPa, indicating the best resistance to plastic deformation, among the studied coatings.

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