Abstract
Ceramic spacers with a high aspect ratio (80 μm/1.1 mm) were fabricated and laid out in a high voltage 5.2 in. field emission display (FED) panel. Alumina was chosen as spacer material and sintered at 1600 °C for high mechanical strength and suitable electric resistivity. Three different types of spacers, single-trench type, double-trench type, and honey-comb types, were considered in this study. We optimized the structure and the layout of spacers in terms of stress distributions, build up profiles of glass, carrier gas flows inside a panel. Among the three different types of spacers, the double-trench structure spacer provided the most uniform gas flow and the highest mechanical strength. The optimal number of spacers with 80 μm width and 1.1 mm height was found to be 7 for an uniform stress distribution in a 5.2 in. FED panel by experiments and computer simulations.
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More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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