Abstract
A method of determining the electron-neutral collision frequency in a low-density plasma is described. A radio-frequency signal of constant frequency and voltage is applied between plane probes while the plasma density is varied to determine an antiresonance point, i.e., a current minimum. Compared with the ordinary resonance probe method using the resonance peak half-width, the new method is insensitive to external circuit impedance and avoids the perturbing effect of the strong rf fields at resonance.
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