Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Abstract

In this study, electron energy distribution functions (EEDFs) are measured using a Langmuir probe in conjunction with the ac superposition method in the downstream region of a planar and unbalanced magnetron argon discharge and the effects of an anode sheath boundary on the discharge characteristics are investigated. The potential of the anode sheath can be controlled by applying a dc voltage to the substrate, and the nonlinear behaviour of the plasma potential with respect to the dc substrate voltage causes the distinctive evolution of the potential of the anode sheath. It is found that when the potential of the anode sheath reaches a specific value, which is related to the threshold energies of argon for the inelastic collisions, an outstanding EEDF transition from a bi-Maxwellian distribution to a single Maxwellian distribution occurs. We introduce the concept of the total electron bounce frequency as an indicator of how the electron collisions such as the electron–electron collision and the inelastic collisions affect the EEDF features as the potential of the anode sheath changes. This result provides the decisive clue to explaining the appearance of the bi-Maxwellian distribution in magnetron discharges. The results of the spatially resolved measurements of EEDF and plasma characteristics are also presented. From these results, we will discuss the electron transport in the downstream region in detail.