Abstract
White-light interferometry is an established method for the measurement of geometrical shape of object with smooth or rough surface [1]. One of the disadvantages of white-light interferometry is that the required broadband light sources suffer from a low luminance. This shows up when the shape of object with a weakly reflecting surface is measured or when the measured area is large. One way to overcome this disadvantage is to replace the broadband light source by two (or more) lasers with various wavelengths. If the broadband light source is replaced by two lasers with various wavelengths, a typical beat pattern arises at the output of the interferometer instead of white-light interferogram. The beat pattern can be used for the determination of the position of the object's surface in a similar way as white-light interferogram. Unlike to white-light interferogram, the beat pattern is periodic and therefore the unambiguity range is limited.
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