Abstract
In this work, we present a bias-scan method to evaluate the source and drain series resistances of heterostructure field-effect transistors, which offers a simple, direct, fast, and reliable technique for on-wafer probing, and can be applied to automatic characterization systems. The source and drain resistances of AlAs/GaAs heterostructure insulated-gate field-effect transistors (HIGFETs) with both undoped and doped channels are studied using this method.
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