Abstract
Measured energy influx densities toward a tungsten dummy substrate in an argon rf-plasma are presented and a model for the description of the energy influx density based on plasma parameters, which have been obtained by Langmuir probe measurements, is applied. Furthermore, temperature measurements of microparticles are presented, which are confined in the plasma sheath. An extension of the model is developed for the description of the energy influx density to the particles. The comparison of model and experimental results offer the possibility to obtain an improved understanding of plasma-surface interactions.
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