Abstract
Achieving and maintaining top SEM performance, ensuring excellent tool matching involves optimization of more than a couple of the attributes of the SEM. Objective instrument quality/performance assessment requires suitable measurement methods and associated reference samples. The electron probe size, shape, direction (incidence angle), are essential inputs for simulation that can be used to fully optimize measurements for speed and reliable data, and for model-based SEM measurements that provides the best, most accurate dimensional measurement results. The presentation addresses these problems by presenting suitable measurement solutions and sample designs.
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