Abstract
This paper introduces a mass measurement method and a system for capacitive membrane sensor, which uses the principle of membrane displacement at a resonance frequency which maximizes output voltage due to its strong vibration. The implemented system consists of dedicated hardware, firmware, and PC. The resonance frequencies of the Si3N4 membrane film are 59.2 kHz and 58.2 kHz measured using laser vibrometer and the proposed method, respectively. The resonance frequency of which quartz has a resonance frequency of 32.768 kHz is 32.775 kHz by our method. The suggested method has 600 times more sensitive in measuring the resonance frequency of a capacitive membrane than the conventional static capacitance measurement method.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
