Abstract
The principal volatile products forming in air degradation of SU-8 polymer under influence of synchrotron radiation in the wavelength range of 2.5–0.25 A have been studied. The material degradation products such as hydrogen, acrolein, acetone, allyl alcohol, benzene, and methyl formate have been identified, as well as atmospheric products. However, the most often products of outgassing are water and carbon oxide molecules, which contribute to the mass loss of the polymer irradiated.
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