Manipulative depolarization and reflectance spectra of morphologically controlled nano-pillars and nano-rods

Abstract

Depolarization of sub-mum-high Si nano-pillar/nano-rod surface reflectance with morphologically controlled anti-reflection spectrum is demonstrated. Extremely small reflectance dip of 1.5% at 400-450 nm for Si nano-pillars is extraordinary when comparing with Si nano-rods, in which the reflectance vs. L/lambda for Si nano-pillars coincides well with the graded-index multilayer based modeling spectrum. Alternatively, Si nano-rods preserve its flattened reflectance spectrum up to 1700 nm, whereas the Si nano-pillar surface reflectance monotonically increases to approach that of bulk Si. The destructive interference is only induced on Si nano-pillar surface with larger aspect-ratio > or =15 and small sidewall slope <7 to suppress surface reflectance at blue-green wavelength region. Anomalous depolarization observed from disordered Si nano-pillar/nano-rod surface reflection indicates that TM-mode incidence interacts with more bound electrons than TE-mode to preserve its effective dielectric permittivity less deviated from the bulk Si. The degraded depolarization ratio observed under TE-mode incidence which correlates well with a simplified bounded-electron resonance model is elucidated.