Abstract

This paper presents an optimization method for facility maintenance scheduling in re-entrant flow shop using Multi-start and Greedy method. The proposed approach regards maintenances as jobs within limits of starting and finishing time, so that the schedule can realize not only proper maintenance to prevent facility troubles but also high productivity with short scheduling time. A case study is presented for a semiconductor manufacturing system, in which it is difficult to find a proper plan because of complex process flow so that the jobs often re-enter into the facilities. The feasibility of the proposal is discussed comparing to Lagrangian decomposition coordination method in the first; the proposed method can realizes feasible solutions within acceptable calculation speed in real. Also, the feasibility is studied in a real semiconductor manufacturing system and confirmed the proposed method can gain its productivity.

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