Abstract
The paper presents the results of theoretical analysis and numerical modeling of physical processes occurring in microwave discharge supported in two intersecting wave beams in H2âCH4 gas mixture. The transformation rules are defined that allow transferring the results of self-consistent solution of system of equations describing the state of microwave discharge for selected parameters (gas pressure, microwave radiation power and frequency, reactor and wave beams geometry) to other parameters. The following parameters ranges are considered: the medium gas pressure range (100â600 Torr), the radiation power from 1 to 30 kW and radiation frequencies from 10 to 60 GHz. The results of numerical simulation confirm the proposed approach and allow comparing the energy efficiency of the systems in terms of their practical application. The optimal parameters for diamond deposition in the considered plasma-chemical reactor in given range are discussed. The limits of applicability of the microwave discharge model and the proposed transformation rules are discussed.
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