Abstract
D.c. magnetron reactive sputtering appears to have great potential for providing the large production volumes that will be required if CuInSe 2 based photovoltaic devices are to make a significant contribution to terrestrial electric power generation. Accordingly we are investigating CuInSe 2 deposition by reactive co-sputtering from Cu and In planar magnetron sources in an ArH 2Se working gas. This paper reviews our work thus far with particular emphasis on the implications of two well-known aspects of the reactive sputtering process to CuInH 2Se sputtering: (1) the formation of surface layers of modified composition on the sputtering target surfaces and (2) the role of substrate reactions in determining the compositions and properties of the resultant films.
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