Abstract
Soft magnetic nanogranular FeCo-Yttrium-doped Zirconia thin films were fabricated using RF magnetron sputtering at different sputtering power. It was found that film electrical resistivity (ρ) decreased steeply with the increase of sputtering power, while both saturation magnetization (4πMs) and natural ferromagnetic resonant frequency (ƒr) increased with the sputtering power ascending from 100 W to 200 W, but decreased when sputtering power exceeded 200 W. X-ray diffraction analysis and transmission electron microscopy confirmed that the films were nanocrystalline/amorphous composites. A saturation magnetization as high as 15.4 kGs and a ferromagnetic resonance frequency above 3 GHz were obtained.
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