Abstract

Tin oxide thin films based chemical sensors have been developed by means of laser induced chemical vapor deposition (L-CVD) and pulsed laser deposition (PLD) methods. The chemical composition of sensors was studied by XPS. By these two methods the tin oxide films were deposited at identical chemical chips and the sensitivity to hydrogen was measured and compared. An improvement of the sensitivity by using noble metal catalysts was observed. In addition, the possibility of detection Co, CH<SUB>4</SUB>, SO<SUB>2</SUB>, NO<SUB>2</SUB> and N<SUB>2</SUB>O gasses on the films deposited by L-CVD technique and to alcohol vapor on the films deposed by PLD was studied.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.