Abstract
Diamond films grow on the anode of DC plasmas while only diamondlike carbon and graphite grow on the cathode. In situ plasma diagnostics were employed to investigate the plasma as a whole and the anode in particular. To this end, pure hydrogen and diamond-producing DC plasmas were studied with optical emission spectroscopy. The pure hydrogen plasmas were analyzed to determine the effect of critical deposition parameters on the visible structure of the plasma. Two methane/hydrogen plasmas were also examined, one of which produced a graphitic film, the other a diamond film. The visible structures of these plasmas differed in that the diamond-producing plasma exhibited evidence of an anode (substrate) glow while the graphite-producing plasma had no glow.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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