Abstract
A new single-mode optical waveguide on a ceramic substrate has been developed to obtain opto-electronic multichip modules for use of high operating frequencies. Propagation loss of the single-mode optical waveguide formed on ceramic substrate is 0.14dB/cm for 1.3 micrometers wavelength.It is fabricated utilizing a siloxane polymer. The film of siloxane polymer can cut-off surface roughness of ceramic substrate. So the optical waveguide on ceramic substrate utilizing the siloxane polymer has fine optical characteristics.
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