Abstract
The results of experimental study of the pump intensity and active media parameters effect on the output energy and total efficiency of a discharge-pumped KrCl (223 nm) excimer laser on a mixture of Ne:Kr:HCl are presented. It was experimentally shown that for the achievement of maximal efficiency of a KrCl excimer laser it is necessary to use optimal pump intensity. The value of the optimal pump intensity for the laser on the mixture Ne:Kr:HC1 was found to be in the range of 5.0-5.5 MW/cm<sup>3</sup>. To achieve such pump intensity the excitation scheme of the <i>LC</i>-inverter type has been used where the energy losses inside discharge circuit had been decreased. Using the pump intensity of 5.5 MW/cm<sup>3</sup> the output energy of 700 mJ with the total efficiency of 1.0 % was obtained for the first time.
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