Abstract
YBa 2Cu 3O x (YBCO) films were prepared by ion beam sputtering (IBS) at low temperatures of 450–650°C with supply of oxygen molecules or plasma. The growth of a-axis-oriented phase ( a-phase) was enhanced by the plasma, then it could be grown at the lowest temperature of 450°C. The crystallinity and surface of a-phase were improved by the plasma. The growth enhancement of a-phase relating to the substrate temperature, oxygen partial pressure and the supply of oxygen plasma are interpreted in terms of thermal migration, particle-assisted migration and surface energy, respectively.
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