Abstract
A 16-channel 200 GHz arrayed-waveguide grating (AWG) (de)-multiplexer is demonstrated experimentally by utilizing Si3N4 buried optical waveguides, which have 50 nm-thick Si3N4 cores and a 15 μm-thick SiO2 cladding. The structure with an ultra-thin core layer helps to reduce the scattering due to the sidewall roughness and consequently shows very low loss of about 0.4~0.8 dB/m. When using this type of optical waveguide for an AWG (de)multiplexer, there is no problem associated with gap refill using the upper-cladding material even when choosing a small (e.g., 1.0 μm) gap between adjacent arrayed waveguides, which helps to reduce the transition loss between the FPR (free-propagation region) and the arrayed waveguides. Therefore, the demonstrated AWG (de)multiplexer based on the present Si3N4 buried optical waveguides has a low on-chip loss. The fabricated AWG (de)multiplexer is characterized in two wavelength ranges around 1310 nm and 1550 nm, respectively. It shows that the crosstalk from adjacent and non-adjacent channels are about -30 dB, and -40 dB, respectively, at the wavelength range of 1310 nm. The Si3N4 AWG (de)multiplexer has a temperature dependence of about 0.011 nm/°C, which is close to that of a pure SiO2 AWG device.
Highlights
As a promising technology for expanding the capacity of an optical communication system, wavelength division multiplexing (WDM) has been used widely in many applications, including optical communications
As a typical integratedmultiplexer used in a WDM system, the arrayed-waveguide grating (AWG) is important for many DWDM systems and modules [1,2]
We have demonstrated a low-loss, low-crosstalk AWGmultiplexer by using Si3N4 buried optical waveguides
Summary
As a promising technology for expanding the capacity of an optical communication system, wavelength division multiplexing (WDM) has been used widely in many applications, including optical communications. E. Bowers, “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Opt. Express 19(4), 3163– 3174 (2011). We demonstrate an AWG based on Si3N4 waveguides with a nano-core layer.
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