Abstract
This paper reports for the first time a MEMS electrostatic vibration energy harvester (e-VEH) with corona-charged vertical electrets on its electrodes. The bandwidth of the 1-cm2 device is extended in low and high frequencies by nonlinear elastic stoppers. With a bias voltage of 46 V (electret@21 V + DC external source@25 V) between the electrodes, the RMS power of the device reaches 0.89 μW at 33 Hz and 6.6 μW at 428 Hz. The -3dB frequency band including the hysteresis is 223∼432 Hz, the one excluding the hysteresis 88∼166 Hz. We also demonstrate the charging of a 47 μF capacitor used for powering a wireless and autonomous temperature sensor node with a data transmission beyond 10 m at 868 MHz.
Highlights
It is widely admitted that low-frequency vibrations naturally exist in the environment and that they offer a potential resource of energy to power electronic devices or sensors
In this work we present a MEMS electrostatic vibration energy harvester (e-VEH) with a large frequency bandwidth, effective from 50 Hz and obtained by the use of nonlinear external stoppers in silicon
Only soft x-ray and UV charging had been proposed as charging methods for MEMS vertical electrets [2], we demonstrate that it is possible with a classical point-grid-plane triode Corona charging method
Summary
It is widely admitted that low-frequency vibrations naturally exist in the environment and that they offer a potential resource of energy to power electronic devices or sensors. By using nonlinear soft springs, the operating frequency bandwidth is expanded at low frequencies [1], but the use of polymers in the device adds complexity to the fabrication process. In this work we present a MEMS e-VEH with a large frequency bandwidth, effective from 50 Hz and obtained by the use of nonlinear external stoppers in silicon. A moving silicon proof mass (400 μmthick) is connected to fixed ends by linear serpentine springs. On both ends of the movable mass, stoppers standing against clamped-clamped elastic beams have been added [3]. The stoppers on the ends of the movable mass hit the elastic beams, which deforms them; this results in a low-frequency and a wideband response of the device. The parylene layer on the movable part is negatively charged with the corona charging setup while the parylene layer on the fixed electrodes is not charged
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