Abstract
The construction and characteristics of a new low-energy Penning ionization gauge (PIG)-type ion source assisted by RF magnetron discharge are described. A two-stage scheme of the ion source is realized by using RF magnetron plasma as the cathodes for the PIG discharge. This scheme permits the independent control of both the ion beam energy and the parameters of discharge plasma in which the ions are produced. A divergent magnetic field configuration provides high current efficiency, reaching 50% under certain conditions. The source produces synthesized ion–electron flow with an ion beam current density of 1.5 mA/cm2 and an ion energy of up to 100 eV under a low working pressure of p=(1-8)×10-4 Torr using inert and reactive gases as the working gas.
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