Abstract
In this paper, a 2×2 micro-PCR array and integrated micro-fluidics in single silicon wafer are reported. The fastest thermal response in literature has been achieved in this device. Single wafer process for the device fabrication is developed for low cost. DRIE is used to form the reaction chamber. The chamber is sealed by a dielectric membrane, which is transparent to fluorescence signal for detection. The chamber is isolated from substrate by trenches. Heater and sensor are integrated on side of the chamber based on a unique joint heating concept. Temperature uniformity is less than 0.2°C. Cross talk is less than 0.5%. Thermal cycling can be finished within 2 minutes for 30 cycles (cycling point: 55°C, 72°C and 95°C). Other fluidic components (pump and valve) can be integrated in the same chip easily. Fluorescence detection of DNA is used to verify the devices before and after PCR reaction.
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