Abstract
Line scales are commonly used as a working standard of length for the calibration of optical measuring instruments such as profile projectors, measuring microscopes and video measuring systems. For high-precision calibration, line scales with low thermal expansion are commonly used. Glass ceramics have a very low coefficient of thermal expansion (CTE) and are widely used for precision line scales. From a previous study, it is known that glass ceramics decrease in length from the time of production or heat treatment. The line scale measurement method can evaluate more than one section of the line scale and is capable of the evaluation of the longitudinal uniformity of the secular change of glass ceramics. In this paper, an arithmetic model of the secular change of a line scale and its longitudinal uniformity is proposed. Six line scales made of Zerodur®, Clearceram® and synthetic quartz were manufactured at the same time. The dimensional changes of the six line scales were experimentally evaluated over 2 years using a line scale calibration system.
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