Abstract
AnN-alkoxy-β-ketoiminato titanium complex, (Ti(2meip)2 (2meip = 4-N-(2-methylethyoxy)imino-2-pentanoate), see Figure for molecular structure, was investigated as a Ti precursor for barium strontium titanate (BST) thin film growth by liquid source metal-organic chemical vapor deposition (LS-MOCVD). The BST films obtained have an ultra-smooth surface and the titanium composition is relatively independent of the deposition temperature.
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