Linking TEM Analytical Spectroscopies for an Assumptionless Compositional Analysis

Abstract

The classical implementation for putting quantitative figures on maps to reveal elemental compositions in transmission electron microscopy is by analytical methods like X-ray and energy-loss spectroscopy. Typically, the technique in use often depends on whether lighter or heavier elements are present and-more practically-which calibrations are available or sample-related properties are known. A framework linking electron energy-loss spectroscopy (EELS) and energy-dispersive X-ray (EDX) signals such that absolute volumetric concentrations can be derived without assumptions made a priori about the unknown sample, is largely missing. In order to combine both techniques and harness their respective potentials for a light and heavy element analysis, we have set up a powerful hardware configuration and implemented an experimental approach, which reduces the need for estimates on many parameters needed for quantitative work such as densities, absolute thicknesses, theoretical ionization cross-sections, etc. Calibrations on specimens with known geometry allow the measurement of inelastic mean free paths. As a consequence, mass-thicknesses obtained from the EDX ζ-factor approach can be broken up and quantities like concentrations and partial energy-differential ionization cross-sections become accessible. ζ-factors can then be used for conversion into EELS cross-sections that are hard to determine otherwise, or conversely, connecting EDXS and EELS in a quantitative manner quite effectively.