Abstract
Instabilities in an asymmetric capacitively coupled radio frequency argon discharge occur within the pressure range of 70-100 Pa while adding low amounts of CF <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> . The development of these instabilities is highly dynamic in time and space. The instabilities strongly influence the optical plasma emission and electron density, respectively.
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