Abstract
Electrostatically driven Micro Scanning Mirrors and Micro Mirror Arrays were designed and fabricated. This paper gives an overview of the device properties and shows by means of examples the large potential of these MOEMS-devices. The single crystal silicon Micro Scanning Mirrors achieve an optical scan range of up to 60° at less than 20 V. High shock resistivity and excellent long run behaviour allowed to build a scan engine for bar code reading. Micro Mirror Arrays with up to 1 million individually addressable pixels were fabricated. The DRAM-like architecture of the circuitry allows us to achieve frame rates up to 2 kHz. The device serves as a high dynamic programmable mask for DUV-microlithography. Patterns meeting the requirements for the 130 nm node were successfully written. A similar device with piston like elements was fabricated for wave front correction in ophthalmology. Arrays with up to 200 * 240 pixels were fabricated.
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