Abstract
We investigate the light scattering through small particles and itsapplications in nanostructuring, such as nanobumping, nanopatterningand dry laser cleaning. The theoretical calculation based on Mie theoryprovides an exact solution for sphere cavity resonance and plasmonresonance, which are two mechanisms for dielectric and metallicparticles assisted surface nanostructuring in near field. Theexperimental results indicate that nanobumps on glass surface andsubwavelength holes array on silicon surface can be formed withoutcracks with the self-assembly of 1 μm silica particle mask under laserirradiation. It is also found that the scattering wave by 40 nm goldparticles can propagate 200 times away in terms of particle radius asrecorded by photoresist under the UV light irradiation. Meanwhile, drylaser cleaning of 40 nm gold particle on silicon wafer is demonstratedat plasmonic resonance frequency. The total cleaning efficiency isestimated to be 80%.
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