Abstract
Amorphous Si:C:O:H films were fabricated at low temperature by C2F6 and O2/C2F6 plasma treating silicone oil liquid. The a-Si:C:O:H films fabricated by C2F6 plasma treatment exhibited white photoluminescence at room temperature, while that by O2/C2F6 plasma treatment exhibited blue photoluminescence. Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the sp3 and sp2 hybridized carbons, SiC bond, SiO bond and carbon-related defects in a-Si:C:O:H films correlated with photoluminescence. It is suggested that the blue emission at 469nm was related to the sp3 and sp2 hybridized carbons, SiC bond, carbon dangling bonds as well as SiO short chains and small clusters, while the light emitting at 554nm was related to the carbon-related defects.
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