Abstract
By combining the LIGA technique with processes used in the manufacture of micromembranes, micromembrane pumps have been built with pump chambers 100 μm in height and with pump membrane diameters between 2 and 5 mm. The pump case is made of gold, whereas the 2.7 μm thin pump membrane consists of titanium. The passive microvalves of the pump consist of patterned micromembranes arranged one over the other and made of titanium and polyimide by use of thin-film techniques. The micropump has been tested so far with an external pneumatic drive. Both air and water have been pumped.
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