Abstract
As more advanced and diverse semiconductor products are demanded, each product requires more processing steps, and the product mix changes frequently. The production volume may exceed the capacity of one line at a semiconductor fabrication plant, and the equipment utilization becomes unbalanced. This situation leads to a combination of multiple lines, which requires the transfer of wafer lots from one line to another. Lifters are machines for inter-line transfers, and they can quickly become a critical bottleneck of semiconductor manufacturing. We introduce an online assignment problem between lifters and inter-line transfers, which is motivated in unified automated material handling systems. We propose several solution methods to improve assignment efficiency and resolve inter-line transfer delays in material handling systems. When compared to the round robin method used currently, the shortest expected arrival time (SEAT) rule decreases delivery time by 8.9 %.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The International Journal of Advanced Manufacturing Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
