Level Excitation Cross Sections of Atomic Fragments in Low-Energy Electron Impact Dissociation of Group IV Hydrides

Abstract

The decay curves of atomic emissions observed in the low-energy electron impact excitation of GeH4, SiH4, and CH4 molecules were measured to evaluate the contributions of cascade transitions to the line emissions. By separating the cascade contributions from the fragment emission cross sections, level excitation cross sections were determined for the Ge I 5s 1Po, Si I 4s 1Po, and C I 3s 1Po levels. The measurements were carried out at the electron energies of 100 eV and around 30 eV. In every case, it was found that about half of these emissive fragments were produced by the radiative cascade from higher levels.