Abstract
Vanadium pentoxide xerogel films deposited onto gold microelectrodes were micropatterned by thermally induced conversion into crystalline α-V 2 O 5 , using optical lithography written at the focus of a confocal Raman microscope. The laser scribing process improved the electric contact and promoted the n-doping of the film with V IV ions. In this way, a field effect transistor like device was constructed and successfully applied as humidity sensor, where the combined lithographic design and the application of a negative back gate field (V G = -10.0 V) boosted the source-drain current by a hundred times, leading to a large gain in sensitivity.
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