Abstract

In order to improve the displacement measurement accuracy of the laser diode self-mixing interference (SMI), phase measurement method is introduced in the SMI signal analysis. In this paper, three modulation technique have been proposed: injection current modulation, external cavity length modulation and sinusoidal phase modulation. Measurement principle of the three modulation techinque are briefly explained. Design of the experimental system, measurement results of micro-displacement will be reported.

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