Abstract
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors trimethylamine alane (CH 3 ) 3 NAIH 3 and oxygen, free-standing three-dimensional (3D) Al 2 O 3 ceramic microstructures can be directly written under software control. By suitable laser irradiation,parts of these 3D microobjects can be moved through thermal expansion forces. This is a first step towards laser rapid prototyping of optically driven 3D microobjects such as microtweezers and microrobots. Examples will be presented.
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