Abstract
The laser ablation properties of a (50%)-isopropyl methyl–(50%)-n-propyl methyl silane copolymer are examined. Both 193- and 248-nm-pulsed excimer laser radiation cleanly and completely remove this material in vacuum above certain energy thresholds (30 and 50 mJ/cm2, respectively). Under these conditions the ablation properties are quite similar to those reported for typical organic polymers. Below threshold, ablation is less efficient and becomes increasingly inefficient as irradiation continues due to spectral bleaching. In the presence of air, material removal is incomplete even for high-energy densities and long exposures. The ablation rate is shown to be independent of substrate material both above and below threshold.
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